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Impact of the electrochemical properties of silicon wafer surfaces on copper outplating from HF solutions
Publication:
Impact of the electrochemical properties of silicon wafer surfaces on copper outplating from HF solutions
Date
1996
Proceedings Paper
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1503.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Teerlinck, Ivo
;
Schmidt, Harald
;
Rotondaro, Antonio
;
Hurd, Trace
;
Mouche, Laurent
;
Mertens, Paul
;
Meuris, Marc
;
Heyns, Marc
;
Vanhaeren, Danielle
;
Vandervorst, Wilfried
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1937
since deposited on 2021-09-29
Acq. date: 2025-10-23
Citations
Metrics
Views
1937
since deposited on 2021-09-29
Acq. date: 2025-10-23
Citations