Publication:
The electrical equivalent sidewall damage in patterned low-k dielectrics
Date
| dc.contributor.author | Iacopi, Francesca | |
| dc.contributor.author | Stucchi, Michele | |
| dc.contributor.author | Richard, Olivier | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Stucchi, Michele | |
| dc.contributor.imecauthor | Richard, Olivier | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.contributor.orcidimec | Richard, Olivier::0000-0002-3994-8021 | |
| dc.date.accessioned | 2021-10-15T14:00:46Z | |
| dc.date.available | 2021-10-15T14:00:46Z | |
| dc.date.issued | 2004-02 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9083 | |
| dc.source.beginpage | G79 | |
| dc.source.endpage | G82 | |
| dc.source.issue | 4 | |
| dc.source.journal | Electrochemical and Solid State Letters | |
| dc.source.volume | 7 | |
| dc.title | The electrical equivalent sidewall damage in patterned low-k dielectrics | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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