Publication:

Defect characterization in templated DSA through electrical measurements

Date

2016
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Author(s)

Rincon Delgadillo, Paulina  
;
Chan, BT  
;
Gronheid, Roel  
;
van der Veen, Marleen  
;
Heylen, Nancy  
;
Vandersmissen, Kevin  
;
Demuynck, Steven  
;
Boemmels, Juergen  

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1953 since deposited on 2021-10-23
Acq. date: 2026-02-24

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1953 since deposited on 2021-10-23
Acq. date: 2026-02-24

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