Publication:

Defect characterization in templated DSA through electrical measurements

Date

2016
Presentation
Simple item page Full metadata Statistics
 
dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorChan, BT
dc.contributor.authorGronheid, Roel
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorHeylen, Nancy
dc.contributor.authorVandersmissen, Kevin
dc.contributor.authorDemuynck, Steven
dc.contributor.authorBoemmels, Juergen
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorVandersmissen, Kevin
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.date.accessioned2021-10-23T14:14:06Z
dc.date.available2021-10-23T14:14:06Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27218
dc.identifier.urlhttps://spie.org/AL16/conferencedetails/alternative-lithographic-technologies
dc.source.conferenceSPIE- Advanced Lithography
dc.source.conferencedate21/02/2016
dc.source.conferencelocationSan Jose, CA USA
dc.title

Defect characterization in templated DSA through electrical measurements

dc.typeOral presentation
dspace.entity.typePublication
Files
Publication available in collections:
Presentations