Publication:

300mm IGZO nFETs with low-T Ru contacts for localized doping and increased BEOL compatibility

Date

2020

Proceedings Paper

Simple item page Full metadata Statistics

Author(s)

;

;

van Setten, Michiel

;

;

Belmonte, Attilio

;

Dekkers, Harold

;

;

;

Puliyalil, Harinarayanan

;

del Agua Borniquel, Jose Ignacio

;

Delhougne, Romain

;

Sankaran, Kiroubanand

;

Statistics

2233 since deposited on 2021-10-28

10last month

Acq. date: 2026-05-16