Publication:
300mm IGZO nFETs with low-T Ru contacts for localized doping and increased BEOL compatibility
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2217 since deposited on 2021-10-28
7last month
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Acq. date: 2026-02-24
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Statistics
Views
2217 since deposited on 2021-10-28
7last month
2last week
Acq. date: 2026-02-24
Citations