Publication:
300mm IGZO nFETs with low-T Ru contacts for localized doping and increased BEOL compatibility
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2221 since deposited on 2021-10-28
6last month
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Acq. date: 2026-03-16
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Statistics
Views
2221 since deposited on 2021-10-28
6last month
1last week
Acq. date: 2026-03-16
Citations