Publication:

300mm IGZO nFETs with low-T Ru contacts for localized doping and increased BEOL compatibility

Date

2020
Proceedings Paper
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Author(s)

Kljucar, Luka  
;
Smets, Quentin  
;
van Setten, Michiel  
;
Mitard, Jerome  
;
Belmonte, Attilio  
;
Dekkers, Harold  
;
Teugels, Lieve  
;
Mao, Ming  
;
Puliyalil, Harinarayanan  
;
del Agua Borniquel, Jose Ignacio  
;
Delhougne, Romain  
;
Sankaran, Kiroubanand  
;
Tokei, Zsolt  

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2209 since deposited on 2021-10-28
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