Publication:

Surface cleaning issues in thin-oxide technology

Date

1999
Presentation
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

3639.pdf 127.47 KB

Author(s)

Mertens, Paul  
;
Bearda, Twan
;
Houssa, Michel  
;
Loewenstein, Lee
;
Teerlinck, Ivo
;
De Gendt, Stefan  
;
Vos, Rita  
;
Kenis, Karine  
;
Naili, Mohamed
;
Heyns, Marc  

Journal

Abstract

Description

Statistics

Views

1963 since deposited on 2021-10-14
1last month
Acq. date: 2026-05-16

Citations

Statistics

Views

1963 since deposited on 2021-10-14
1last month
Acq. date: 2026-05-16

Citations