Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
Leakage mechanism in a porous organic low-k polymer
Publication:
Leakage mechanism in a porous organic low-k polymer
Copy permalink
Date
2004-10
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Li, Yunlong
;
Tokei, Zsolt
;
Maex, Karen
Journal
Microelectronic Engineering
Abstract
Description
Metrics
Views
1848
since deposited on 2021-10-15
3
last month
Acq. date: 2025-12-15
Citations
Metrics
Views
1848
since deposited on 2021-10-15
3
last month
Acq. date: 2025-12-15
Citations