Publication:
Leakage mechanism in a porous organic low-k polymer
Date
| dc.contributor.author | Li, Yunlong | |
| dc.contributor.author | Tokei, Zsolt | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Li, Yunlong | |
| dc.contributor.imecauthor | Tokei, Zsolt | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.contributor.orcidimec | Li, Yunlong::0000-0003-4791-4013 | |
| dc.date.accessioned | 2021-10-15T14:27:42Z | |
| dc.date.available | 2021-10-15T14:27:42Z | |
| dc.date.issued | 2004-10 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9202 | |
| dc.source.beginpage | 20 | |
| dc.source.endpage | 24 | |
| dc.source.issue | 1_4 | |
| dc.source.journal | Microelectronic Engineering | |
| dc.source.volume | 76 | |
| dc.title | Leakage mechanism in a porous organic low-k polymer | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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