Publication:
Electrical properties and noise of poly SiGe deposited at temperatures compatible with MEMS integration on top of standard CMOS
Date
| dc.contributor.author | Sedky, Sherif | |
| dc.date.accessioned | 2021-10-14T23:07:44Z | |
| dc.date.available | 2021-10-14T23:07:44Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6815 | |
| dc.source.beginpage | 83 | |
| dc.source.conference | BioMEMS and Bionanotechnology | |
| dc.source.conferencedate | 1/04/2002 | |
| dc.source.conferencelocation | San Francisco, CA USA | |
| dc.source.endpage | 88 | |
| dc.title | Electrical properties and noise of poly SiGe deposited at temperatures compatible with MEMS integration on top of standard CMOS | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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