Publication:

Plasma modification of Hf based high-k dielectrics: effect of nitridation and silicon nitride deposition

Date

2004
Proceedings Paper
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Author(s)

Tsai, W.
;
Maes, J.W.
;
De Witte, Hilde
;
Chen, J.
;
Delabie, Annelies  
;
Carter, Richard
;
Richard, Olivier  
;
Caymax, Matty  
;
Conard, Thierry  
;
Young, Edward
;
De Gendt, Stefan  

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