Publication:
Plasma modification of Hf based high-k dielectrics: effect of nitridation and silicon nitride deposition
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1919 since deposited on 2021-10-15
1last month
Acq. date: 2025-12-08
Citations
Metrics
Views
1919 since deposited on 2021-10-15
1last month
Acq. date: 2025-12-08
Citations