Publication:
Demonstration of ultra-thin Si grinding process controlled by in-situ non-contact gauge for 3D stacked IC (3D-SIC)
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
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| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
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| cris.virtual.orcid | 0000-0002-0856-851X | |
| cris.virtual.orcid | 0000-0002-7610-0513 | |
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| cris.virtual.orcid | 0000-0002-3096-050X | |
| cris.virtual.orcid | 0000-0002-6878-7124 | |
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| cris.virtualsource.department | 9156bc37-ce4f-400b-8108-5ac33a3650ac | |
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| cris.virtualsource.orcid | 9156bc37-ce4f-400b-8108-5ac33a3650ac | |
| dc.contributor.author | Zhao, Ming | |
| dc.contributor.author | Verbinnen, Greet | |
| dc.contributor.author | Yoshida, Shinji | |
| dc.contributor.author | Hayakawa, Susumu | |
| dc.contributor.author | Tabuchi, Tomotaka | |
| dc.contributor.author | Jourdain, Anne | |
| dc.contributor.author | Beyne, Eric | |
| dc.contributor.author | Swinnen, Bart | |
| dc.contributor.author | Leunissen, Peter | |
| dc.contributor.imecauthor | Zhao, Ming | |
| dc.contributor.imecauthor | Verbinnen, Greet | |
| dc.contributor.imecauthor | Jourdain, Anne | |
| dc.contributor.imecauthor | Beyne, Eric | |
| dc.contributor.imecauthor | Swinnen, Bart | |
| dc.contributor.orcidimec | Zhao, Ming::0000-0002-0856-851X | |
| dc.contributor.orcidimec | Beyne, Eric::0000-0002-3096-050X | |
| dc.date.accessioned | 2021-10-19T01:04:49Z | |
| dc.date.available | 2021-10-19T01:04:49Z | |
| dc.date.issued | 2010 | |
| dc.identifier.doi | 10.37665/waybwkl52215 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18427 | |
| dc.source.beginpage | 49 | |
| dc.source.conference | 7th Annual International Wafer-Level Packaging Conference | |
| dc.source.conferencedate | 11/10/2010 | |
| dc.source.conferencelocation | Santa Clara, CA USA | |
| dc.source.endpage | 54 | |
| dc.title | Demonstration of ultra-thin Si grinding process controlled by in-situ non-contact gauge for 3D stacked IC (3D-SIC) | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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