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Low temperature Si, SiGe, and Ge growth and atomic layer doping with B, P, and As on Si(001) by chemical vapor deposition
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1836 since deposited on 2021-10-17
Acq. date: 2025-12-16
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Views
1836 since deposited on 2021-10-17
Acq. date: 2025-12-16
Citations