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Low temperature Si, SiGe, and Ge growth and atomic layer doping with B, P, and As on Si(001) by chemical vapor deposition

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1842 since deposited on 2021-10-17
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Acq. date: 2026-08-09

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1842 since deposited on 2021-10-17
1last month
1last week
Acq. date: 2026-08-09

Citations