Publication:

High-aspect-ratio ruthenium lnes for buried power rail

Date

2018

Proceedings Paper

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Files

38537.pdf 2.37 MB

Author(s)

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Teugels, Lieve

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Boemmels, Juergen

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Adelmann, Christoph

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Heylen, Nancy

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Jamieson, Geraldine

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Varela Pedreira, Olalla

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Statistics

2051 since deposited on 2021-10-25

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Acq. date: 2026-10-04