Publication:

5nm: has the time for a device change come?

Date

2016

Proceedings Paper

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Files

33716.pdf 731.4 KB

Author(s)

Raghavan, Praveen

;

Garcia Bardon, Marie

;

Schuddinck, Pieter

;

;

Yakimets, Dmitry

;

;

Debacker, Peter

;

Verkest, Diederik

;

Statistics

2018 since deposited on 2021-10-23

2last month

Acq. date: 2026-04-07