Publication:

Dry-Etching Processes for High-Aspect-Ratio Features with Sub-10 nm Resolution High-chi Block Copolymers

Date

2021
Journal article
https://doi.org/10.1021/acsami.1c13503
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Author(s)

Pound-Lana, Gwenaelle
;
Bezard, Philippe  
;
Petit-Etienne, Camille
;
Cavalaglio, Sebastien
;
Cunge, Gilles
;
Cabannes-Boue, Benjamin
;
Fleury, Guillaume
;
Chevalier, Xavier
;
Zelsmann, Marc

Journal

ACS APPLIED MATERIALS & INTERFACES

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