Atomic scale characterization of 3D structures (FinFETs) with atom probe tomography

dc.contributor.author	Kambham, Ajay Kumar
dc.contributor.thesisadvisor	Vandervorst, Wilfried
dc.date.accessioned	2021-10-22T02:27:11Z
dc.date.available	2021-10-22T02:27:11Z
dc.date.embargo	9999-12-31
dc.date.issued	2014-03
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/24028
dc.title	Atomic scale characterization of 3D structures (FinFETs) with atom probe tomography
dc.type	PHD thesis
dspace.entity.type	Publication
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