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Use of indium and gallium as P-type dopants in Si 0.1 mm MOSFETs
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Use of indium and gallium as P-type dopants in Si 0.1 mm MOSFETs
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Date
1996
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Biesemans, Serge
;
Kubicek, Stefan
;
De Meyer, Kristin
Journal
Japanese Journal of Applied Physics. Part 1
Abstract
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1853
since deposited on 2021-09-29
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Acq. date: 2026-01-10
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Metrics
Views
1853
since deposited on 2021-09-29
1
last month
Acq. date: 2026-01-10
Citations