Publication:

Towards understanding degradation and breakdown of SiO2/high-k stacks

Date

2002

Proceedings Paper

Simple item page Full metadata Statistics

Files

6467.pdf 315.55 KB

Author(s)

Kauerauf, Thomas

;

Degraeve, Robin

;

Cartier, Eduard

;

Govoreanu, Bogdan

;

;

;

Pantisano, Luigi

;

Kerber, Andreas

;

Groeseneken, Guido

Metrics

1831 since deposited on 2021-10-14

Acq. date: 2025-12-15