Publication:

Towards understanding degradation and breakdown of SiO2/high-k stacks

Date

2002

Proceedings Paper

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Files

6467.pdf 315.55 KB

Author(s)

Kauerauf, Thomas

;

Degraeve, Robin

;

Cartier, Eduard

;

Govoreanu, Bogdan

;

;

;

Pantisano, Luigi

;

Kerber, Andreas

;

Groeseneken, Guido

Statistics

1837 since deposited on 2021-10-14

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Acq. date: 2026-08-08