Publication:

Challenges of clean/strip processing for Cu/LowK technology

Date

2004

Proceedings Paper

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Author(s)

Baklanov, Mikhaïl

;

;

;

Iacopi, Francesca

;

Van Aelst, Joke

;

Struyf, Herbert

;

Boullart, Werner

;

Vanhaelemeersch, Serge

;

Statistics

2000 since deposited on 2021-10-15

Acq. date: 2026-02-28