Publication:
The influence of the initial LWR, CD and EUV-resist composition on LWR reduction by H2 plasma treatment
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1848 since deposited on 2021-10-22
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Acq. date: 2026-10-05
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Views
1848 since deposited on 2021-10-22
1last month
1last week
Acq. date: 2026-10-05
Citations