Integration of 650 V GaN power ICs on 200 mm engineered substrates

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Author(s)

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Wellekens, Dirk

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Magnani, Alessandro

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Amirifar, Nooshin

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Bakeroot, Benoit

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Heuken, Michael

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Odnoblyudov, Vlad

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Groeseneken, Guido

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Decoutere, Stefaan

Journal

IEEE Transactions on Semiconductor Manufacturing

Metrics

1982 since deposited on 2021-10-28

Acq. date: 2025-10-24