Publication:

Acoustic modulation during laser debonding of collective hybrid bonded dies

Date

2021
Proceedings Paper
https://doi.org/10.1109/ectc32696.2021.00334
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Author(s)

Kennes, Koen  
;
Phommahaxay, Alain  
;
Guerrero, Alice
;
Bumueller, Dennis
;
Suhard, Samuel  
;
Bex, Pieter
;
Tussing, Sebastian
;
Liu, Xiao
;
Beyer, Gerald  
;
Beyne, Eric  

Journal

na

Abstract

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1248 since deposited on 2023-06-20
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1248 since deposited on 2023-06-20
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Acq. date: 2026-09-14

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