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Acoustic modulation during laser debonding of collective hybrid bonded dies
Publication:
Acoustic modulation during laser debonding of collective hybrid bonded dies
Date
2021
Proceedings Paper
https://doi.org/10.1109/ECTC32696.2021.00334
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kennes, Koen
;
Phommahaxay, Alain
;
Guerrero, Alice
;
Bumueller, Dennis
;
Suhard, Samuel
;
Bex, Pieter
;
Tussing, Sebastian
;
Liu, Xiao
;
Beyer, Gerald
;
Beyne, Eric
Journal
na
Abstract
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Views
1235
since deposited on 2023-06-20
Acq. date: 2025-10-23
Citations
Metrics
Views
1235
since deposited on 2023-06-20
Acq. date: 2025-10-23
Citations