Publication:

Acoustic modulation during laser debonding of collective hybrid bonded dies

Date

2021

Proceedings Paper

https://doi.org/10.1109/ectc32696.2021.00334

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Author(s)

;

Phommahaxay, Alain

;

Guerrero, Alice

;

Bumueller, Dennis

;

;

;

Tussing, Sebastian

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Journal

na

Statistics

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Acq. date: 2026-10-03