Publication:
Strain mapping of tensile strained silicon transistors with embedded Si1yCy source and drain by dark-field holography
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1898 since deposited on 2021-10-17
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Acq. date: 2025-10-25
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Views
1898 since deposited on 2021-10-17
426item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations