Publication:
Strain mapping of tensile strained silicon transistors with embedded Si1yCy source and drain by dark-field holography
Date
| dc.contributor.author | Hue, Florent | |
| dc.contributor.author | Hytch, Martin | |
| dc.contributor.author | Houdellier, Florent | |
| dc.contributor.author | Bender, Hugo | |
| dc.contributor.author | Claverie, Alain | |
| dc.contributor.imecauthor | Bender, Hugo | |
| dc.date.accessioned | 2021-10-17T23:02:14Z | |
| dc.date.available | 2021-10-17T23:02:14Z | |
| dc.date.issued | 2009 | |
| dc.identifier.issn | 0003-6951 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15506 | |
| dc.source.beginpage | 73103 | |
| dc.source.issue | 7 | |
| dc.source.journal | Applied Physics Letters | |
| dc.source.volume | 95 | |
| dc.title | Strain mapping of tensile strained silicon transistors with embedded Si1yCy source and drain by dark-field holography | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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