Publication:

The influence of oxidation-induced stress on the generation current and its impact on scaled device performance

Date

1996
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorSmeys, Peter
dc.contributor.authorGriffin, P. B.
dc.contributor.authorRek, Z. U.
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorSaraswat, K. C.
dc.contributor.imecauthorDe Wolf, Ingrid
dc.date.accessioned2021-09-29T15:27:39Z
dc.date.available2021-09-29T15:27:39Z
dc.date.embargo9999-12-31
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1501
dc.source.beginpage709
dc.source.conferenceInternational Electron Devices Meeting. Technical Digest - IEDM
dc.source.conferencedate8/12/1996
dc.source.conferencelocationSan Francisco, CA USA
dc.source.endpage12
dc.title

The influence of oxidation-induced stress on the generation current and its impact on scaled device performance

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
1474.pdf
Size:
423.04 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions