Publication:
On the data interpretation of the C-AFM measurements in the characterization of thin insulating layers
Date
| dc.contributor.author | Petry, Jasmine | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Pantisano, Luigi | |
| dc.contributor.author | Degraeve, Robin | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Degraeve, Robin | |
| dc.date.accessioned | 2021-10-15T15:25:49Z | |
| dc.date.available | 2021-10-15T15:25:49Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9422 | |
| dc.source.conference | 13th Workshop on DIelectrics in Microelectronics - Wodim | |
| dc.source.conferencedate | 28/06/2004 | |
| dc.source.conferencelocation | Kinsale Ireland | |
| dc.title | On the data interpretation of the C-AFM measurements in the characterization of thin insulating layers | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |