Publication:
Strategies to improve linewidth control for 0.25 µm and 0.18 µm devices
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2 since deposited on 2021-09-29
Acq. date: 2026-03-01
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1895 since deposited on 2021-09-29
Acq. date: 2026-03-01
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2 since deposited on 2021-09-29
Acq. date: 2026-03-01
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1895 since deposited on 2021-09-29
Acq. date: 2026-03-01
Citations