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Compensation effect during water desorption from siloxane-based spin-on dielectric thin films
Publication:
Compensation effect during water desorption from siloxane-based spin-on dielectric thin films
Date
2000
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Proost, Joris
;
Baklanov, Mikhaïl
;
Maex, Karen
;
Delaey, L.
Journal
J. Vacuum Science and Technology B
Abstract
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1961
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1961
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations