Compensation effect during water desorption from siloxane-based spin-on dielectric thin films

dc.contributor.author	Proost, Joris
dc.contributor.author	Baklanov, Mikhaïl
dc.contributor.author	Maex, Karen
dc.contributor.author	Delaey, L.
dc.contributor.imecauthor	Maex, Karen
dc.date.accessioned	2021-10-14T13:36:48Z
dc.date.available	2021-10-14T13:36:48Z
dc.date.embargo	9999-12-31
dc.date.issued	2000
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/4678
dc.source.beginpage	303
dc.source.endpage	306
dc.source.issue	1
dc.source.journal	J. Vacuum Science and Technology B
dc.source.volume	B18
dc.title	Compensation effect during water desorption from siloxane-based spin-on dielectric thin films
dc.type	Journal article
dspace.entity.type	Publication
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