Publication:

Optimized process simulation of USJ for HKMG DRAM periphery transistors

Date

2014

Proceedings Paper

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Files

29402.pdf 1.49 MB

Author(s)

Spessot, Alessio

;

Caillat, Christian

;

Ritzenthaler, Romain

;

;

Statistics

1905 since deposited on 2021-10-22

Acq. date: 2026-05-15