Publication:

Optimized process simulation of USJ for HKMG DRAM periphery transistors

Date

2014
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorSpessot, Alessio
dc.contributor.authorCaillat, Christian
dc.contributor.authorRitzenthaler, Romain
dc.contributor.authorSchram, Tom
dc.contributor.authorFazan, Pierre
dc.contributor.imecauthorSpessot, Alessio
dc.contributor.imecauthorRitzenthaler, Romain
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorFazan, Pierre
dc.contributor.orcidimecRitzenthaler, Romain::0000-0002-8615-3272
dc.contributor.orcidimecSchram, Tom::0000-0003-1533-7055
dc.date.accessioned2021-10-22T06:05:56Z
dc.date.available2021-10-22T06:05:56Z
dc.date.embargo9999-12-31
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24557
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6818722&queryText%3DUSJ+for+HKMG+DRAM+periphery+transistors
dc.source.beginpage1
dc.source.conferenceIEEE Workshop On Microelectronics And Electron Devices - WMED
dc.source.conferencedate18/04/2014
dc.source.conferencelocationBoise, ID USA
dc.source.endpage4
dc.title

Optimized process simulation of USJ for HKMG DRAM periphery transistors

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
29402.pdf
Size:
1.49 MB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions