Publication:

Sub-10-9 Ohm.cm2 contact resistivity on p-SiGe achieved by Ga doping and nanosecond laser activation

Date

2017

Proceedings Paper

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Files

36010.pdf 1.29 MB

Author(s)

Everaert, Jean-Luc

;

Schaekers, Marc

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;

;

Hikavyy, Andriy

;

;

del Agua Borniquel, Jose Ignacio

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;

;

Aderhold, Wolfgang

;

Mayur, Abhilash

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;

;

;

De Meyer, Kristin

;

;

Horiguchi, Naoto

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1948 since deposited on 2021-10-24

Acq. date: 2026-03-01