Publication:
Highly doped SiGe epitaxy in view of S/D applications
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2021 since deposited on 2021-10-29
6last month
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Acq. date: 2026-02-24
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Statistics
Views
2021 since deposited on 2021-10-29
6last month
3last week
Acq. date: 2026-02-24
Citations