Publication:
Effect of UV irradiation on modification and subsequent wet removal of model and post-etch fluorocarbon residues
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1892 since deposited on 2021-10-20
2last month
Acq. date: 2025-12-16
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Views
1892 since deposited on 2021-10-20
2last month
Acq. date: 2025-12-16
Citations