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Advanced dicing technologies for combination of wafer to wafer and collective die to wafer fusion bonding
Publication:
Advanced dicing technologies for combination of wafer to wafer and collective die to wafer fusion bonding
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Date
2019
Proceedings Paper
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39827.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Inoue, Fumihiro
;
Phommahaxay, Alain
;
Podpod, Arnita
;
Suhard, Samuel
;
Hoshino, Hitoshi
;
Berthold, Moeller
;
Sleeckx, Erik
;
Rebibis, Kenneth June
;
Miller, Andy
;
Beyne, Eric
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2
since deposited on 2021-10-27
Acq. date: 2025-12-14
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2162
since deposited on 2021-10-27
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last month
Acq. date: 2025-12-14
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Metrics
Downloads
2
since deposited on 2021-10-27
Acq. date: 2025-12-14
Views
2162
since deposited on 2021-10-27
1
last month
Acq. date: 2025-12-14
Citations