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Quantification of Ge in Si1-xGex by using low energy Cs+ and O2+ ion beams
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Quantification of Ge in Si1-xGex by using low energy Cs+ and O2+ ion beams
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Date
2013
Journal article
https://doi.org/10.1002/sia.5049
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pureti, Rathaiah
;
Vandervorst, Wilfried
Journal
Surface and Interface Analysis
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1938
since deposited on 2021-10-21
Acq. date: 2026-01-07
Citations
Metrics
Views
1938
since deposited on 2021-10-21
Acq. date: 2026-01-07
Citations