Publication:

High resolution dopant/carrier profiling for deep submicron technologies

Date

1999
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Author(s)

Vandervorst, Wilfried  
;
Clarysse, Trudo
;
De Wolf, Peter
;
Eyben, Pierre  
;
Haegeman, Bart
;
Xu, Mingwei
;
Trenkler, Thomas
;
Hantschel, Thomas  
;
Stephenson, Robert
;
Conard, Thierry  
;
De Witte, Hilde

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2008 since deposited on 2021-10-14
Acq. date: 2026-04-05

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2008 since deposited on 2021-10-14
Acq. date: 2026-04-05

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