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Articles
Precuring implant photoresists for shrink and patterning control
Publication:
Precuring implant photoresists for shrink and patterning control
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Date
2013
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27106.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Winroth, Gustaf
;
Rosseel, Erik
;
Delvaux, Christie
;
Altamirano Sanchez, Efrain
;
Ercken, Monique
Journal
Journal of Micro/Nanolithography MEMS and MOEMS
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Downloads
1
since deposited on 2021-10-21
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Views
2023
since deposited on 2021-10-21
2
last month
1
last week
Acq. date: 2025-12-10
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