Publication:

Dummy design characterization for STI CMP with fixed abrasive

Date

2014-11

Proceedings Paper

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Author(s)

Tsvetanova, Diana

;

Devriendt, Katia

;

;

Vandeweyer, Tom

;

;

;

Horiguchi, Naoto

;

Struyf, Herbert

Metrics

1948 since deposited on 2021-10-22

Acq. date: 2025-12-10