Publication:
Application of selective epitaxial growth for merging fins in source/drain areas of sub 20 nm FinFET transistors
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1894 since deposited on 2021-10-21
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Acq. date: 2026-10-09
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Statistics
Views
1894 since deposited on 2021-10-21
1last month
1last week
Acq. date: 2026-10-09
Citations