Publication:
Application of selective epitaxial growth for merging fins in source/drain areas of sub 20 nm FinFET transistors
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1893 since deposited on 2021-10-21
10last month
Acq. date: 2026-02-25
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Views
1893 since deposited on 2021-10-21
10last month
Acq. date: 2026-02-25
Citations