Publication:

Crystalline defect analysis in epitaxial Si0.7Ge0.3 layer using site-specific ECCI-STEM

Date

2021

Journal article

https://doi.org/10.1016/j.micron.2021.103123

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Author(s)

;

;

Hantschel, Thomas

;

Vystavel, Tomas

;

Porret, Clément

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;

Journal

MICRON

Statistics

1858 since deposited on 2022-03-03

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Acq. date: 2026-02-25