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Crystalline defect analysis in epitaxial Si0.7Ge0.3 layer using site-specific ECCI-STEM
Publication:
Crystalline defect analysis in epitaxial Si0.7Ge0.3 layer using site-specific ECCI-STEM
Date
2021
Journal article
https://doi.org/10.1016/j.micron.2021.103123
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Han, Han
;
Strakos, Libor
;
Hantschel, Thomas
;
Vystavel, Tomas
;
Porret, Clément
;
Loo, Roger
;
Caymax, Matty
Journal
MICRON
Abstract
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1850
since deposited on 2022-03-03
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Acq. date: 2025-10-24
Citations
Metrics
Views
1850
since deposited on 2022-03-03
431
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations