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Recent developments in nuclear methods in support of semiconductor characterization
Publication:
Recent developments in nuclear methods in support of semiconductor characterization
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Date
2003
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Brijs, Bert
;
Bender, Hugo
;
Huyghebaert, Cedric
;
Janssens, Tom
;
Vandervorst, Wilfried
;
Nakajima, K.
;
Kimura, K.
;
Bergmaier, A.
;
Dollinger, G.
;
van den Berg, J.A.
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1995
since deposited on 2021-10-15
Acq. date: 2025-12-09
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1
since deposited on 2021-10-15
Acq. date: 2025-12-09
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1995
since deposited on 2021-10-15
Acq. date: 2025-12-09
Citations