Publication:

Recent developments in nuclear methods in support of semiconductor characterization

Date

2003
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorBrijs, Bert
dc.contributor.authorBender, Hugo
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorJanssens, Tom
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorNakajima, K.
dc.contributor.authorKimura, K.
dc.contributor.authorBergmaier, A.
dc.contributor.authorDollinger, G.
dc.contributor.authorvan den Berg, J.A.
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.date.accessioned2021-10-15T04:04:14Z
dc.date.available2021-10-15T04:04:14Z
dc.date.embargo9999-12-31
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7258
dc.source.beginpage50
dc.source.conferenceAnalytical Techniques for Semiconductor Materials and Processes
dc.source.conferencedate27/04/2003
dc.source.conferencelocationParis France
dc.source.endpage62
dc.title

Recent developments in nuclear methods in support of semiconductor characterization

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
7582.pdf
Size:
665.15 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions