Publication:
Cluster optimization to improve total CD control as an enabler for double patterning
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1955 since deposited on 2021-10-17
3last month
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Acq. date: 2026-01-06
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Metrics
Views
1955 since deposited on 2021-10-17
3last month
2last week
Acq. date: 2026-01-06
Citations