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Combining TEM and 3D scanning spreading resistance microscopy, a hybrid approach, to the analysis of Ge gate-all-around nano-wires
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Combining TEM and 3D scanning spreading resistance microscopy, a hybrid approach, to the analysis of Ge gate-all-around nano-wires
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Date
2018
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Favia, Paola
;
Celano, Umberto
;
Drijbooms, Chris
;
Witters, Liesbeth
;
Arimura, Hiroaki
;
Capogreco, Elena
;
Vancoille, Eric
;
Bender, Hugo
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2014
since deposited on 2021-10-25
Acq. date: 2025-12-15
Citations
Metrics
Views
2014
since deposited on 2021-10-25
Acq. date: 2025-12-15
Citations