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Influence of pulse duration in picosecond laser ablation of silicon nitride layers
Publication:
Influence of pulse duration in picosecond laser ablation of silicon nitride layers
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Date
2011
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Schulz-Ruhtenberg, Malte
;
Trusheim, Daniel
;
Das, Jo
;
Krantz, Stephan
;
Wieduwilt, Jan
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1767
since deposited on 2021-10-19
Acq. date: 2025-12-16
Citations
Metrics
Views
1767
since deposited on 2021-10-19
Acq. date: 2025-12-16
Citations