Influence of pulse duration in picosecond laser ablation of silicon nitride layers

dc.contributor.author	Schulz-Ruhtenberg, Malte
dc.contributor.author	Trusheim, Daniel
dc.contributor.author	Das, Jo
dc.contributor.author	Krantz, Stephan
dc.contributor.author	Wieduwilt, Jan
dc.date.accessioned	2021-10-19T18:37:13Z
dc.date.available	2021-10-19T18:37:13Z
dc.date.issued	2011
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/19754
dc.source.beginpage	614
dc.source.conference	Proceedings of the Silicon PV conference (1st International Conference on Crystalline Silicon Photovoltaics)
dc.source.conferencedate	17/04/2011
dc.source.conferencelocation	Freiburg Germany
dc.source.endpage	619
dc.title	Influence of pulse duration in picosecond laser ablation of silicon nitride layers
dc.type	Proceedings paper
dspace.entity.type	Publication
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