Publication:

Selecting alternative metals for advanced interconnects

Date

2024-11-07
Journal article
https://doi.org/10.1063/5.0224027
Simple item page Full metadata Statistics
 
dc.contributor.authorSoulie, Jean-Philippe
dc.contributor.authorSankaran, Kiroubanand
dc.contributor.authorVan Troeye, Benoit
dc.contributor.authorLesniewska, Alicja
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorOprins, Herman
dc.contributor.authorDelie, Gilles
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorBoakes, Lizzie
dc.contributor.authorRolin, Cedric
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorCroes, Kristof
dc.contributor.authorPark, Seongho
dc.contributor.authorSwerts, Johan
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorTokei, Zsolt
dc.contributor.authorAdelmann, Christoph
dc.contributor.imecauthorSoulie, Jean-Philippe
dc.contributor.imecauthorSankaran, Kiroubanand
dc.contributor.imecauthorVan Troeye, Benoit
dc.contributor.imecauthorLesniewska, Alicja
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorOprins, Herman
dc.contributor.imecauthorDelie, Gilles
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorBoakes, Lizzie
dc.contributor.imecauthorRolin, Cedric
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorPark, Seongho
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.orcidimecSoulie, Jean-Philippe::0000-0002-5956-6485
dc.contributor.orcidimecSankaran, Kiroubanand::0000-0001-6988-7269
dc.contributor.orcidimecVan Troeye, Benoit::0000-0003-2073-1188
dc.contributor.orcidimecLesniewska, Alicja::0000-0003-3863-065X
dc.contributor.orcidimecVarela Pedreira, Olalla::0000-0002-2987-1972
dc.contributor.orcidimecOprins, Herman::0000-0003-0680-4969
dc.contributor.orcidimecDelie, Gilles::0000-0002-5646-3261
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.contributor.orcidimecBoakes, Lizzie::0000-0001-6204-4971
dc.contributor.orcidimecRolin, Cedric::0000-0001-5542-8504
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecSwerts, Johan::0000-0001-7547-7194
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.contributor.orcidimecTokei, Zsolt::0000-0003-3545-3424
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.date.accessioned2024-11-04T08:32:51Z
dc.date.available2024-11-04T08:32:51Z
dc.date.issued2024-11-07
dc.identifier.doi10.1063/5.0224027
dc.identifier.issn0021-8979
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/44736
dc.publisherAIP
dc.source.beginpage171101
dc.source.issue17
dc.source.journalJournal of Applied Physics
dc.source.numberofpages34
dc.source.volume136
dc.subject.keywordscopper interconnect
dc.subject.keywordsinterconnects
dc.subject.keywordsmetallization process
dc.subject.keywordsthin films
dc.subject.keywordsalternative metals
dc.title

Selecting alternative metals for advanced interconnects

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
Selecting alternative metals for advanced interconnects (2024).pdf
Size:
8.69 MB
Format:
Adobe Portable Document Format
Description:
Published version
Download
Publication available in collections:
Articles