Publication:

Selecting alternative metals for advanced interconnects

Date

2024-11-07
Journal article
https://doi.org/10.1063/5.0224027
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dc.contributor.authorSoulie, Jean-Philippe
dc.contributor.authorSankaran, Kiroubanand
dc.contributor.authorVan Troeye, Benoit
dc.contributor.authorLesniewska, Alicja
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorOprins, Herman
dc.contributor.authorDelie, Gilles
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorBoakes, Lizzie
dc.contributor.authorRolin, Cedric
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorCroes, Kristof
dc.contributor.authorPark, Seongho
dc.contributor.authorSwerts, Johan
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorTokei, Zsolt
dc.contributor.authorAdelmann, Christoph
dc.contributor.imecauthorSoulie, Jean-Philippe
dc.contributor.imecauthorSankaran, Kiroubanand
dc.contributor.imecauthorVan Troeye, Benoit
dc.contributor.imecauthorLesniewska, Alicja
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorOprins, Herman
dc.contributor.imecauthorDelie, Gilles
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorBoakes, Lizzie
dc.contributor.imecauthorRolin, Cedric
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorPark, Seongho
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.orcidimecSoulie, Jean-Philippe::0000-0002-5956-6485
dc.contributor.orcidimecSankaran, Kiroubanand::0000-0001-6988-7269
dc.contributor.orcidimecVan Troeye, Benoit::0000-0003-2073-1188
dc.contributor.orcidimecLesniewska, Alicja::0000-0003-3863-065X
dc.contributor.orcidimecVarela Pedreira, Olalla::0000-0002-2987-1972
dc.contributor.orcidimecOprins, Herman::0000-0003-0680-4969
dc.contributor.orcidimecDelie, Gilles::0000-0002-5646-3261
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.contributor.orcidimecBoakes, Lizzie::0000-0001-6204-4971
dc.contributor.orcidimecRolin, Cedric::0000-0001-5542-8504
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecSwerts, Johan::0000-0001-7547-7194
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.contributor.orcidimecTokei, Zsolt::0000-0003-3545-3424
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.date.accessioned2024-11-04T08:32:51Z
dc.date.available2024-11-04T08:32:51Z
dc.date.issued2024-11-07
dc.identifier.doi10.1063/5.0224027
dc.identifier.issn0021-8979
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/44736
dc.publisherAIP
dc.source.beginpage171101
dc.source.issue17
dc.source.journalJournal of Applied Physics
dc.source.numberofpages34
dc.source.volume136
dc.subject.keywordscopper interconnect
dc.subject.keywordsinterconnects
dc.subject.keywordsmetallization process
dc.subject.keywordsthin films
dc.subject.keywordsalternative metals
dc.title

Selecting alternative metals for advanced interconnects

dc.typeJournal article
dspace.entity.typePublication
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