Direct etched Cu characterization for advanced interconnects

Simple item page Full metadata Statistics

Files

31423.pdf 673.52 KB

Author(s)

Wen, Liang Gong

;

Yamashita, Fumiko

;

;

;

Tahara, Shigeru

;

Shimoda, Keiichi

;

Maeshiro, Takeru

;

Nishimura, Eiichi

;

Lazzarino, Frederic

;

;

Boemmels, Juergen

;

Metrics

1956 since deposited on 2021-10-23

Acq. date: 2025-10-23