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Chemical and structural modifications in a 193-nm photoresist after low-k dry etch
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1939 since deposited on 2021-10-17
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Acq. date: 2025-10-24
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Views
1939 since deposited on 2021-10-17
412item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations